Surface Micromachined Linear Electrostatic Stepper Motor - Micro Electro Mechanical Systems, 1997. MEMS ' 97, Proceedings, IEEE., Tenth Annual International
نویسنده
چکیده
A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process.. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8 * 0.3 have been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed succesfully to obtain a deflection of 15 pm, with steps in the order of 2 pm. The deflection is limited by the suspension. The generated force equals 3 pN at 40 V driving voltage.
منابع مشابه
The Shuffle Motor: A High Force, High Precision Linear Electrostatic Stepper Motor - Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference o
The shuffle motor is a electrostatic stepper motor that employs a mechanical transformation to obtain high forces and small steps. A model has been made to calculate the driving voltage, step size and maximum load to pull as well as the optimal geometry. Tests results are an effective step size of about 85 nm and a maximum produced force of about 40 pN at 40V clamping voltage and 25 V actuator ...
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